Parker Veriflo BFR5K Series Regulator
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BFR5K Features and Benefits
- 316L Stainless Steel Poppet and 321 Stainless Steel Bellows.
- High flow capacity.
- Tied diaphragm to poppet for added safety.
- Balanced poppet design reduces supply pressure effect.
- Capable of operating at a wide range of flows from 100 up to 5,000 slpm.
- Compatibility with semiconductor bulk gases.
- No spring in wetted area.
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The BFR5K Series regulator is a compact, high flow, high performance Bulk Gas regulator designed for semiconductor processing.
The BFR5K provides a stable outlet pressure over a wide variety of conditions with flow rates as high as 5000 slpm.
The unique balanced poppet design allows the regulator to maintain the outlet pressure setting regardless of changes in the upstream pressure.