AERA Semiconductor Grade Mass Flow Controllers (MFCs)

The AERA line of Mass Flow Controllers was acquired from Advanced Energy by Hitachi Metals in 2010.  Please bear with us while our site page covering the AERA line is under construction.  Meanwhile, if you have requirements for Ultra-High Purity Mass Flow Control, please contact us.   

AERA Tranformer Series specification sheet

Tranformer Series presentation