Polyimide Heaters and integrated Assemblies represent a thermal solution for application requiring precision temperature profiles at lower process temperatures. By supplying a thermal assembly that has been optimized for an application, Durex can assure that part-to-part performance will meet the semiconductor equipment specifications. Polyimide heater solutions are commonly used in wafer testing, dry etch, and other applications.
- Process temperature 200°C (392°F)
- Kapton® or silicone rubber materials
- Moisture and chemical-resistant