Cast Vacuum Chamber Heaters

Cast Vacuum Chamber Heaters are designed to optimize temperature profile in a vacuum chamber.

Uniform process temperature improves etch and deposition rates and uniformity.

  • Three dimensional cast aluminum assemblies
  • Operating temperature < 450°C (842°F)
  • Aluminum alloys 170.1, 319 or 356
  • Precision machining of vacuum and other features
  • Integral RTD or thermocouple sensors

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IES Technical Sales is a certified supplier for Durex Industries in the Northeast United States.  If you and your company have any questions at all please feel free to contact us and request more information. 

 

We can meet your needs with anything regarding a price quote, service questions, or comparrisons.  IES Technical Sales is here to help our customers in making the right choice with their semiconductor process needs.