Cast Vacuum Chamber Heaters
Cast Vacuum Chamber Heaters are designed to optimize temperature profile in a vacuum chamber.
Uniform process temperature improves etch and deposition rates and uniformity.
- Three dimensional cast aluminum assemblies
- Operating temperature < 450°C (842°F)
- Aluminum alloys 170.1, 319 or 356
- Precision machining of vacuum and other features
- Integral RTD or thermocouple sensors