Bake / Chill Pedestal Heaters
The cast-in pedestal heater for semiconductor processing is basically a bake or chill platen that has an aluminum “neck” attached to the underside of the platen by electron beam welding. A helium leak test is performed to insure a vacuum tight assembly. The surface of the cast-in pedestal is precision machined with a flatness tolerance of .0005” and typically includes lift pin holes and proximity pins per individual specifications. The cast-in pedestal heater can also include an integral temperature sensor as part of the assembly.