Standard Pedestal Heaters
The standard cast-in pedestal heater manufactured by Durex for semicondcutor processing is designed to provide a quick solution for wafer processing applications. These cast-in heaters are designed specifically for 200mm and 300mm wafers. The standard design eliminates the need for costly tooling and mold design associated with new design custom heaters. They are ideal for research and development, rapid prototypes, and emergency repair requirements. A variety of options can be incorporated into the final cast-in product to customize the design for specific application requirements. These include a hard-anodized surface, lift pin holes, vacuum channels, and several electrical termination styles.