Cast-in Hot Chuck Heaters

Durex manufactures cast-in hot chucks or “heated tools” for semiconductor processing that deliver precise heat to wafers during the manufacturing process. These cast-in platens are individually customized with vacuum channels on the working surface, specific lift pin hole locations, and other surface or backside mounting holes. Manufactured from pure aluminum (99.7%), these cast-in hot chucks have a temperature uniformity capability of 1% of the process temperature and a flatness tolerance of .0005” across the surface. A hard coat anodized finish is available or the surface can be supplied as a number 16-ground finish.

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IES Technical Sales is a certified supplier for Durex Industries in the Northeast United States. If you and your company have any questions at all please feel free to contact us and request more information.

We can meet your needs with anything regarding a price quote, service questions, or comparrisons. IES Technical Sales is here to help our customers in making the right choice with their semiconductor process needs.