Aluminum Pedestal Heaters

Aluminum Pedestal Heaters are the material of choice for most deposition and etch applications, because aluminum has excellent thermal conductivity and is inert to many process chemicals such as HF.

Operating temperature < 450°C(842°F)
Aluminum alloys 170.1, 319 or 356
Perpendicularity < 0.1 mm
Surface flatness to 0.005 mm
Machined vacuum, lift pin, and other features
Welding of dissimilar materials
Integral cable and tubular heater assemblies
Anodized aluminum and other coatings

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IES Technical Sales is a certified supplier for Durex Industries in the Northeast United States. If you and your company have any questions at all please feel free to contact us and request more information.

We can meet your needs with anything regarding a price quote, service questions, or comparrisons. IES Technical Sales is here to help our customers in making the right choice with their semiconductor process needs.