Semiconductor Proccessing 

Durex Industries Semiconductor Processing

 

Durex Industries uses the equipment in today's manufacturing processes for transistors, memory devices, and microprocessors require precise thermal solutions. Knowing the importance of temperature, Durex Industries continues to innovate and provide customer specific thermal solutions that are critical to the next generation equipment and processes. Specifically, the processing of semiconductors requires deposition of materials to create semiconductor junctions, interconnection of layers, and etching of photoresist and line edges. Precisely controlling the temperature of the deposition and etch process is critical to the performance of the device and increasing yield. 



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Sensors

 

RTD&Thermalcouple sensors

RTD and Thermocouple Sensors


RTD or Thermocouple Sensor Assemblies used in semiconductor and PV processes require knowledge of thermodynamics and the application’s environment. Durex sensor assemblies are designed to be robust and provide the highest degree of accuracy and repeatability.

  • Single or multipoint sensor assemblies
  • NIST traceable calibration on refractory thermocouple materials
  • 100, 1000, and 2000 Ω RTD assemblies

Panels

 Radiant Heating Panels 119x119

Radient Heating Panels

Radiant Heating Panels are designed for thermal precision and robustness in large sizes for conveyor furnace, roll-to-roll (web) furnaces and single piece vacuum chambers. The cable (coil) or tubular heater layout is optimized for the equipment design and specified temperature profile.

  • Dimensions< 2.5 sq meters (26.91 sq. ft.)
  • Operating temperature < 700°C (1292° F)
  • Stainless steel reflective panel
  • Vacuum flanges
  • Integrated RTD or thermocouple sensor assemblies
 

Conduction Heating Panels 119x119

Conduction Heating Panels

Conduction Heating Panels are designed and manufactured in large dimensions using either cast aluminum heater technology or mill groove heater assemblies with top and bottom plate welded or mechanically fastened to insure heater placement.

  • Cast aluminum dimensions to < 2.5 sq meters (26.91 sq. ft.)
  • Stainless steel dimensions < 2.5 sq meters (26.91 sq. ft.)
  • Operating temperature < 700°C (1292°F)
  • Perpendicularity < 0.1 mm (0.0004 in.)
  • Surface flatness to 0.5 mm (0.02 in.)

Thermocouples

 

Mineral Insulated Thermocouples

 

describe the imageMineral insulated thermocouples are manufactured with compacted MgO insulation housed in a stainless steel or alloy sheath that protects the thermocouple element from the application environment. This construction provides anincredibly durable design that can be adapted to a wide variety of applications. 
The compacted MgO construction offers superior life compared to other types of thermocouples due to the ability to withstand extreme thermal shock and prevent contamination of the element itself. Mineral insulated thermocouples can be constructed to operate at temperatures up to 2400°F. Termination options for these sensors are wide ranging and include plugs mounted directly to the sheath, cast aluminum or iron terminal heads, and flexible leadwires.

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IES Technical Sales is a certified supplier for Durex Industries in the Northeast United States.  If you and your company have any questions at all please feel free to contact us and request more information. 

 

We can meet your needs with anything regarding a price quote, service questions, or comparrisons.  IES Technical Sales is here to help our customers in making the right choice with their semiconductor process needs.