In short, if ESD (Electrostatic Discharge) or substrate thermal exposure are major concerns,
go with microwave, if you are dealing with inorganics, go with RF. Here is a simple chart showing a more detailed comparison:
| |
|
RF Plasma Ash/Strip |
|
Microwave Plasma Ash/Strip |
| Type of Process |
|
Combination of chemical and physcial plasma, combined with temperature |
|
Predominantly chemical etch by elecrically neutral radicals |
| |
|
|
|
|
| Selectivity |
|
Fair to poor; anisotropic |
|
Good to excellent: isotropic |
| |
|
|
|
|
| Throughput (on platen) |
|
High |
|
Moderate |
| |
|
|
|
|
| Throughput (on shelves) |
|
Low |
|
None |
| |
|
|
|
|
| Throughput (in magazines) |
|
Slotted - moderate Closed - none |
|
High |
| |
|
|
|
|
| Uniformity |
|
Shelves - good Slotted Magazines - fair |
|
Generally good - improved with use of rotary table or ECR cage |
| |
|
|
|
|
| Sample Self-Biasing |
|
High |
|
Low |
| |
|
|
|
|
| UV Light Emittance |
|
Moderate to high |
|
Low to zero |
| |
|
|
|
|
| Subtrate Heating |
|
Moderate to high |
|
Low to moderate |
| |
|
|
|
|
| Electrodes in Plasma Chamber |
|
Yes |
|
No |
| |
|
|
|
|
| Sample Processing on Shelves |
|
Yes |
|
No |
| |
|
|
|
|
| Sample Processing in Magazines |
|
Yes, slotted |
|
Yes, closed or open |
| |
|
|
|
|
| Organics Removal |
|
Yes |
|
Yes |
| |
|
|
|
|
| Inorganics Removal |
|
Yes |
|
No |
This article was posted by Mike Berry of IES Technical Sales. For more information on Mike go to www.linkedin.com/in/michaelberry47
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